TRANSPARENT CONDUCTING ZnO:In THIN FILMS PREPARED BY MAGNETRON DC SPUTTERING METHOD
نویسندگان
چکیده
منابع مشابه
Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering
This report describes the effects of impurity-co-doping on transparent conducting Al-doped ZnO (AZO) films prepared by DC magnetron sputtering using a target composed of dopant powder added to a mixture of ZnO and Al O powder. The chemical 2 3 stability of transparent conducting AZO films could be improved by co-doping Cr or Co without significantly altering the original electrical and optical ...
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ژورنال
عنوان ژورنال: Science and Technology Development Journal
سال: 2011
ISSN: 1859-0128
DOI: 10.32508/stdj.v14i1.1886